Welcome to CORIAL

Corial WelcomeCORIAL is a process company that designs and manufactures plasma etching and deposition systems with innovative solutions dedicated to the semiconductor compounds, optoelectronics, LED, OLED and MEMS industries. We provide a new range of tools based on the same mechanical, electronics and software platform. This modular approach allows a step by step investment from RIE to highly sophisticated High Density Plasma systems with vacuum load-lock. CORIAL  customizes processes  as required by customers for nanotechnologies and new technologies for energy, health, information and communication. CORIAL also provides a real time process support via internet access to the systems.

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Visit our partner
Evatec Process Systems

We proudly announce that Corial and Evatec have teamed together to bring the flexibility, productivity and enterprise reliability of their respective technologies, products and services to provide advanced solutions that address customers evolving needs.
 
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News

  • Corial 300IL
    • CORIAL got the first sales of its new Corial 300IL from Korea and Taiwan...
    • CORIAL got the first sales of its new Corial 300IL from Korea and Taiwan. This tool is specially designed for the PSS and GaN etching processes used in LED manufacturing.
    • Read more details about the Corial 300IL
  • Series 300
    • CORIAL introduces a new serie of ICP-RIE and PECVD systems...
    • CORIAL introduces a new serie of ICP-RIE and PECVD systems for the batch processes in LED manufacturing. These systems display the lowest cost of ownership available on the market.
    • Read more about sapphire ICP Etching
  • Low Temperature Deposition
    • A new ICPCVD source with patent pending gas shower...
  • New Etching Processes
    • Very high etching rates for SiC and sapphire ...

CORIAL - 11, Chemin du Vieux Chêne 38240 MEYLAN - France - Tel: +33 (0)4 76 01 10 10 - Fax: +33 (0)4 76 24 53 81
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