Welcome to CORIAL
CORIAL is a company that designs and manufactures plasma etching and deposition systems with innovative processes dedicated to LED, OLED, MEMS and semiconductor compounds. We provide a wide range of tools based on the same mechanical, electronics and software platform. This modular approach allows a step by step investment from PECVD, RIE to highly sophisticated High Density Plasma systems with vacuum load-lock. CORIAL develops or customizes processes required for OLED, LED manufacturing (PSS & GaN) and for nanotechnologies involved in energy, healthcare, information and communication. CORIAL also provides a real time process support via internet access to the equipment.
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Corial and Evatec have teamed together to bring the flexibility, productivity and enterprise reliability of their respective technologies, products and services to provide advanced solutions that address customers evolving needs in LED, OLED and semiconductor compounds manufacturing.
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