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Welcome to CORIAL

Corial WelcomeCORIAL is a company that designs and manufactures plasma etching and deposition systems with innovative processes dedicated to LED, OLED, MEMS and semiconductor compounds. We provide a wide range of tools based on the same mechanical, electronics and software platform. This modular approach allows a step by step investment from PECVD, RIE to highly sophisticated High Density Plasma systems with vacuum load-lock. CORIAL develops or customizes processes required for OLED, LED manufacturing (PSS & GaN) and for nanotechnologies involved in energy, healthcare, information and communication. CORIAL also provides a real time process support via internet access to the equipment.

Visit our partner
Evatec Process Systems

Corial and Evatec have teamed together to bring the flexibility, productivity and enterprise reliability of their respective technologies, products and services to provide advanced solutions that address customers evolving needs in LED, OLED and semiconductor compounds manufacturing.
 
GaN-Ni-mask-WS Superlattice-WS HR-Si_20nm-WS Al_STM-WS SiC-STM-WS VCSEL-WS Microlens-in-SiO2-WS SiO2-profond-WS NanYa-M1-WS DSE-35m-WS

News

  • CORIAL opens its new factory in Bernin
    • An important milestone was achieved in CORIAL development with the opening of our Bernin factory. The new site has a manufacturing capacity of 200 process modules per year. Such high capacity will enable short lead time to our customers.
  • News For PECVD in LED Manufacturing
    • CORIAL delivered its first Corial D500, a very large area PECVD system for LED and OLED manufacturing, to a Taiwanese customer. The Corial D500 can process: 104 X 2", 25 X 4" or 9 X 6" wafers with ±3% deposition uniformities.
  • New PSS Performance (LED)
    • CORIAL made great achievement in PSS uniformity for 4" wafers. The PSS uniformity is better than ±0.05 µm for PSS Height and Width. Standard deviation of reflectivity of a batch of  7 X 4" wafers is equal to 0.8!
    • Read more about the Corial 300IL
    Corial 210 Series
    • CORIAL introduces the 210 series with vacuum robot. The new series replace the previous 200 one having a linear magnetic drive for loading-unloading. All process modules: ICP-RIE, PECVD and ICP-CVD are available with the 210 series.

CORIAL - 11, Chemin du Vieux Chêne 38240 MEYLAN - France - Tel: +33 (0)4 76 01 10 10 - Fax: +33 (0)4 76 24 53 81
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