Last update: 28 March 2009  
CORIAL SAS is a process company that designs and manufactures plasma etching and deposition equipment with innovative solutions dedicated to the semiconductor compounds, optoelectronics, LED, OLED and MEMS industries. We provide a new range of equipment based on one single mechanical, electronics and software platform. This  modular approach allows a step by step investment from RIE to highly sophisticated High Density Plasma systems with vacuum load-lock. CORIAL also customizes processes and provides the process support required by customers for nanotechnologies and new technologies for energy, health, information and communication.




 
Applications
Failure analysis
Optoelectronics
MEMS
Highlights

   New compact products available

   Size = 75 cm wide X 108 cm deep!

 

------------- Corial 200FA --------------
Fast die deprocessing using
HCD (Hollow Cathode Discharge)

-------------- Corial 200I ---------------
ICP etcher for die / wafer deprocessing

------------- Corial 200ML --------------
ECR etcher for low damage etching
 

-------------- Corial 300IL --------------
350 mm ICP etcher
with load-lock
Special design for sapphire etching!

-------------- Corial 400L ---------------
Large area RIE etcher
with load-lock
for OLED made on 14" X 14"
substrates

------------- Corial D350L --------------
Large area PECVD tool (300 mm) with
vacuum load-lock operating at 325°C

------------- Corial 200D ---------------
Low temperature ICP PECVD tool with
vacuum load-lock operating < 150°C

 

         New processes available:

- ICP of Sapphire with high throughput,

- Fast ICP of GaAs via-holes,

- Fast ICP of SiC via-holes,

- Low damage GaN etching,

- High resolution Si etching (20 nm),

- Deep Silicon Etching (50 µm), 

- SiC and aSi-H deposition,

- Low temperature deposition (<150°C) 

- Liquid sources available, 

- Superlattice deposition.

 

           Product Key Features:

- Highly Versatile (many applications
  in the same process chamber),

- Stress control of high quality films,

- Low Cost of Ownership,

- Internet real time process support. 






 
 
CORIAL SAS   11, Chemin du Vieux Chêne   38240 MEYLAN - France - Tel: +33 (0)4 76 01 10 10 - Fax: +33 (0)4 76 24 53 81