Welcome to CORIAL

Corial WelcomeCORIAL is a process company that designs and manufactures plasma etching and deposition systems with innovative solutions dedicated to the semiconductor compounds, optoelectronics, LED, OLED and MEMS industries. We provide a new range of tools based on the same mechanical, electronics and software platform. This modular approach allows a step by step investment from RIE to highly sophisticated High Density Plasma systems with vacuum load-lock. CORIAL  customizes processes  as required by customers for nanotechnologies and new technologies for energy, health, information and communication. CORIAL also provides a real time process support via internet access to the systems.

Accueil-Machines-WS

Visit our partner
Evatec Process Systems

We proudly announce that Corial and Evatec have teamed together to bring the flexibility, productivity and enterprise reliability of their respective technologies, products and services to provide advanced solutions that address customers evolving needs.
 
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News

  • Corial 300IL
    • CORIAL got new sales of its Corial 300IL PSS etcher from Korea, Taiwan and China.
    • CORIAL made significant improvement in etch uniformity for the PSS process used in LED manufacturing on sapphire wafers. A ±2.5% etch uniformity was achieved on 19 X 2" wafers!
    • Read more details about the Corial 300IL
  • Series 300
    • CORIAL introduces a new serie of ICP-RIE and PECVD systems...
    • CORIAL introduces a new serie of ICP-RIE and PECVD systems for the batch processes in LED manufacturing. These systems display the lowest cost of ownership available on the market.
    • Read more about sapphire ICP Etching
  • Low Temperature ICP-CVD
    • A new ICPCVD source with patent pending gas shower...
    • A new ICPCVD source with patent pending gas shower was developed for low temperature deposition of SiO2 and Si3N4. High quality films were achieved at deposition temperature < 70°C!
    • Read more details about the Corial 200D
  • New Etching Processes
    • Very high etching rates for SiC and sapphire ...

CORIAL - 11, Chemin du Vieux Chêne 38240 MEYLAN - France - Tel: +33 (0)4 76 01 10 10 - Fax: +33 (0)4 76 24 53 81
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