Welcome to CORIAL
CORIAL is a process company that designs and manufactures plasma etching and deposition systems with innovative solutions dedicated to the semiconductor compounds, optoelectronics, LED, OLED and MEMS industries. We provide a new range of tools based on the same mechanical, electronics and software platform. This modular approach allows a step by step investment from RIE to highly sophisticated High Density Plasma systems with vacuum load-lock. CORIAL customizes processes as required by customers for nanotechnologies and new technologies for energy, health, information and communication. CORIAL also provides a real time process support via internet access to the systems.
Visit our partner
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We proudly announce that Corial and Evatec have teamed together to bring the flexibility, productivity and enterprise reliability of their respective technologies, products and services to provide advanced solutions that address customers evolving needs.
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