Welcome to CORIAL

Corial WelcomeCORIAL is a company that designs and manufactures plasma etching and deposition systems with innovative processes dedicated to LED, OLED, MEMS and semiconductor compounds. We provide a wide range of tools based on the same mechanical, electronics and software platform. This modular approach allows a step by step investment from PECVD, RIE to highly sophisticated High Density Plasma systems with vacuum load-lock. CORIAL develops or customizes processes required for semiconductor compounds, Green IT, imaging, LEDs (PSS & GaN), OLEDs and lighting and for nanotechnologies involved in communication, energy, safety, healthcare and the environment. CORIAL also provides a real time process support via internet access to the equipment.

Visit our partner

Evatec Process Systems

Corial and Evatec have teamed together to bring the flexibility, productivity and enterprise reliability of their respective technologies, products and services to provide advanced solutions that address customers evolving needs in LED, OLED and semiconductor compounds manufacturing.

ZnS-CdTe-MCT-WS 9-Metal-WS HR-Si_20nm-WS PSS-GP-WS Al_STM-WS Sapphire-BGU-WS SiC-STM-WS HCD-GaAs-Isotrope-WS Microsection-WS Superlattice-WS


  • Meet us at SEMICON Europa - October 6-8 Dresden, Germany
    • CORIAL will attend Semicon Europa 2015, the leading trade fair for the semiconductor industry in Europe.
    • Meet us on booth #1413 Get a chance to discover the latest CORIAL processes and equipment innovations.
    • Our Sales, Marketing and Technical representatives will be pleased to discuss your application needs!
  • News For PECVD in LED Manufacturing
    • CORIAL delivers to a Taiwanese customer the Corial D500, a very large area PECVD system equipped with heating, cooling stations and loading assistance for LED and OLED manufacturing. The Corial D500 can deposit SiO2 and Si3N4 on 104 X 2", 25 X 4" or 9 X 6" wafers with ±3% deposition uniformities.
  • New PSS Performance (LED)
    • CORIAL made great achievement in PSS uniformity for 2" and 4" wafers. The PSS uniformity is better than ±0.03 µm for PSS Height and Width. Standard deviation of reflectivity of a batch of  7 X 4" wafers is equal to 0.6!
    • Read more about the Corial 300IL
    Corial 210 Series
    • CORIAL introduces the 210 series with vacuum robot. The new series replace the previous 200 one having a linear magnetic drive for loading-unloading. All process modules: ICP-RIE, PECVD and ICP-CVD are available with the 210 series.

CORIAL - 266, Chemin des Franques 38190 BERNIN - France - Tel: +33 (0)4 76 01 10 10 - Fax: +33 (0)4 76 24 53 81
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